Nirasaki, Japan

Yuji Asakawa


Average Co-Inventor Count = 3.4

ph-index = 2

Forward Citations = 10(Granted Patents)


Location History:

  • Yamanashi, JP (2016)
  • Nirasaki, JP (2010 - 2024)

Company Filing History:


Years Active: 2010-2024

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4 patents (USPTO):Explore Patents

Title: Innovator Yuji Asakawa: Pioneering Substrate Processing Technology

Introduction: Yuji Asakawa, an accomplished inventor based in Nirasaki, Japan, has made significant contributions to the field of substrate processing technology. With a portfolio of four patents, he has developed innovative solutions that enhance the efficiency and effectiveness of substrate etching processes. His work represents a blend of practical engineering and cutting-edge technology.

Latest Patents: Among Yuji Asakawa’s latest patents are two remarkable inventions. The first is an "Inner wall and substrate processing apparatus," which features a cylindrical inner wall designed for use in a substrate processing apparatus. This apparatus surrounds a stage where substrates are placed, incorporating a gap that facilitates processing. It includes multiple slits and grooves that enhance the functionality of the inner wall, enabling improved substrate treatment.

The second patent is for an "Apparatus and method for etching substrate." This innovative substrate etching apparatus comprises a treatment container that accommodates a substrate and includes a stage within, along with a gas supply that delivers treatment gas to the substrate. The design includes both central and outer peripheral regions to maximize the efficiency of gas distribution during the etching process.

Career Highlights: Yuji Asakawa is currently employed at Tokyo Electron Limited, where his expertise is instrumental in advancing substrate processing technologies. His dedication to innovation has established him as a key figure within his organization. Throughout his career, Asakawa has focused on developing technologies that streamline complex processes in semiconductor manufacturing.

Collaborations: Yuji has collaborated with talented individuals in the industry, including his coworkers Shuji Akiyama and Tadashi Obikane. Together, they work towards pushing the boundaries of technology and driving progress in semiconductor fabrication.

Conclusion: In conclusion, Yuji Asakawa's work reflects his commitment to innovation and his expertise in substrate processing technology. Through his patents, he continues to influence the field, making significant contributions that benefit the semiconductor industry. As he forges ahead in his career, his inventive spirit will likely lead to further advancements in technology.

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