The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2010
Filed:
May. 14, 2008
Shuji Akiyama, Nirasaki, JP;
Tadashi Obikane, Nirasaki, JP;
Masaru Suzuki, Nirasaki, JP;
Yasuhito Yamamoto, Nirasaki, JP;
Kazuya Yano, Nirasaki, JP;
Yuji Asakawa, Nirasaki, JP;
Kazumi Yamagata, Nirasaki, JP;
Shigeki Nakamura, Nirasaki, JP;
Eiichi Matsuzawa, Nirasaki, JP;
Kazuhiro Ozawa, Nirasaki, JP;
Fumito Kagami, Nirasaki, JP;
Shinji Kojima, Nirasaki, JP;
Shuji Akiyama, Nirasaki, JP;
Tadashi Obikane, Nirasaki, JP;
Masaru Suzuki, Nirasaki, JP;
Yasuhito Yamamoto, Nirasaki, JP;
Kazuya Yano, Nirasaki, JP;
Yuji Asakawa, Nirasaki, JP;
Kazumi Yamagata, Nirasaki, JP;
Shigeki Nakamura, Nirasaki, JP;
Eiichi Matsuzawa, Nirasaki, JP;
Kazuhiro Ozawa, Nirasaki, JP;
Fumito Kagami, Nirasaki, JP;
Shinji Kojima, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A prove apparatus includes a first and a second loading port for mounting therein two carriers facing each other, a wafer transfer mechanism having a rotation center between the loading ports, and a first and a second inspection unit being symmetrical to each other and disposed in accordance with the arrangement of the loading ports. In this configuration, wafers are directly transferred between the carrier and a wafer chuck of the inspection unit by the wafer transfer mechanism. The wafer transfer mechanism has three arms for unloading two wafers from the carrier. The prove apparatus has a compact size and achieves a high throughput.