Company Filing History:

7 out of 10,295

Tokyo Electron Limited

patents

1 out of 101

Tokyo Electron Limi Ted

patents

Years Active: 2010-2014

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8 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 8726748 - Probe apparatus and substrate transfer method (2014-05-20),

2. 8536891 - Inspection method for inspecting electric characteristics of devices formed on target object (2013-09-17),

3. 8294480 - Inspection apparatus having alignment mechanism (2012-10-23),

4. 8081007 - Inspection apparatus and method for inspecting electric characteristics of devices formed on target object (2011-12-20),

5. 7859283 - Probe apparatus, probing method, and storage medium (2010-12-28),

6. 7812627 - Test device (2010-10-12),

7. 7724007 - Probe apparatus and probing method (2010-05-25),

8. 7701236 - Each inspection units of a probe apparatus is provided with an imaging unit to take an image of a wafer (2010-04-20),

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For the Inventor, By the Inventor

Yasuhito Yamamoto

Location History:

Company Filing History:

Years Active: 2010-2014