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For the Inventor, By the Inventor

Kumagaya, Japan

Yuho Kanaya

This inventor holds 26 USPTO granted patents and 6 published patent applications and 7 EPO patents, primarily in Exposure Apparatus Design. Top assignee: Nikon Corporation. Active years: 2010-2019.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Yuho Kanaya. Retrieved from https://idiyas.com/inventor/yuho-kanaya

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 26 

% Patents Active = 34.6

 

Average Co-Inventor Count = 1.4

ph-index = 6

Forward Citations = 82(Granted Patents)


Location History:

  • Tokyo, JP (2012)
  • Kamagaya, JP (2012)
  • Kumagaya, JP (2010 - 2019)

Company Filing History:

goldMedal26 out of 8,994 
 
Nikon Corporation
 patents

Years Active: 2010-2019

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Areas of Expertise:
Exposure Apparatus
Device Manufacturing
Movable Body System
Pattern Formation
Measurement Method
Position Control
Drive Method
Apparatus Design
Production Method
Pattern Formation Method
Measurement Device
26 patents (USPTO):Explore Patents
1. 10209623 - Exposure apparatus, exposure method, and method for producing device (2019-02-19),
2. 9436102 - Movable body system, movable body drive method, pattern formation apparatus, pattern formation method, exposure apparatus, exposure method, and device manufacturing method (2016-09-06),
3. 9383656 - Exposure apparatus, exposure method, and method for producing device (2016-07-05),
4. 9304412 - Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and measuring method (2016-04-05),
5. 9256140 - Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method with measurement device to measure movable body in Z direction (2016-02-09),
6. 9063438 - Exposure apparatus, exposure method, and method for producing device (2015-06-23),
7. 9013681 - Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method (2015-04-21),
8. 8867022 - Movable body drive method and movable body drive system, pattern formation method and apparatus, and device manufacturing method (2014-10-21),
9. 8817236 - Movable body system, movable body drive method, pattern formation apparatus, pattern formation method, exposure apparatus, exposure method, and device manufacturing method (2014-08-26),
10. 8792086 - Movable body drive method and movable body drive system, and pattern formation method and pattern formation apparatus (2014-07-29),
11. 8786829 - Exposure apparatus, exposure method, and device manufacturing method (2014-07-22),
12. 8767182 - Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method (2014-07-01),
13. 8665455 - Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method (2014-03-04),
14. 8582084 - Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, position control method and position control system, and device manufacturing method (2013-11-12),
15. 8547527 - Movable body drive method and movable body drive system, pattern formation method and pattern formation apparatus, and device manufacturing method (2013-10-01),

Title: The Inventor Spotlight: Yuho Kanaya

Introduction: Meet the innovative inventor Yuho Kanaya, hailing from Kumagaya, Japan, with an impressive portfolio of 26 patents. Her groundbreaking work in the field of exposure apparatus and device manufacturing methods has revolutionized the industry.

Latest Patents: Yuho Kanaya's recent patents showcase her expertise in developing cutting-edge technologies for exposure apparatus and device manufacturing methods. One of her latest patents involves a liquid immersion exposure apparatus with a unique projection system, movable stage, alignment system, and measurement member. This apparatus enables precise alignment and measurement, crucial in the production of high-quality devices.

Career Highlights: As a key member of the renowned Nikon Corporation, Yuho Kanaya has played a pivotal role in driving innovation and pushing boundaries in the field of optical technologies. Her contributions have significantly impacted the development of exposure apparatus, pattern formation methods, and device manufacturing processes.

Collaborations: Yuho Kanaya has collaborated closely with talented individuals within Nikon Corporation, such as Yuichi Shibazaki and Masahiko Yasuda. Together, they have worked on projects aiming to improve exposure techniques, enhance precision in pattern formation, and streamline device manufacturing methods. Their collaborative efforts have resulted in the successful implementation of novel technologies in the industry.

Conclusion: Yuho Kanaya's exceptional talent, dedication, and innovative spirit have solidified her position as a visionary inventor in the realm of exposure apparatus and device manufacturing methods. Her relentless pursuit of excellence continues to inspire advancements in the field, shaping the future of technology and manufacturing processes.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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