The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2014
Filed:
Aug. 11, 2011
Yuichi Shibazaki, Kumagaya, JP;
Yuho Kanaya, Kumagaya, JP;
Yuichi Shibazaki, Kumagaya, JP;
Yuho Kanaya, Kumagaya, JP;
Nikon Corporation, Tokyo, JP;
Abstract
Drive-control of a movable body along a two-dimensional plane includes a process in which on switching from servo control of position in directions of three degrees of freedom of the movable body within a plane parallel to the two-dimensional plane using a first detection device to servo control using an encoder system, a detection device that detects positional information of the movable body in a direction perpendicular to the two-dimensional plane and tilt direction around at least one axis with respect to the two-dimensional plane switches from a second detection device when the movable body is in a suspended state, to a third detection device that has a plurality of detection positions placed in at least a part of an operating area of the movable body, and detects positional information in the perpendicular direction when the movable body is positioned at any of the detection positions.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile