Company Filing History:
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Years Active: 2016-2018
Title: Yugo Tomita: Innovator in Plasma Processing Technology
Introduction
Yugo Tomita is a notable inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 3 patents. His work has been instrumental in advancing semiconductor manufacturing processes.
Latest Patents
One of his latest patents is a plasma processing device and plasma processing method. This device includes a processing chamber that defines a plasma processing space and a stage for mounting a target substrate. It features a gas supply mechanism for introducing processing gas into the plasma processing space, a plasma generation mechanism for supplying electromagnetic energy, and a control unit that initiates a warm-up process for the plasma process. Another significant patent involves a wiring structure that has an interlayer insulating film and a wiring line without a barrier layer. This innovation aims to improve the contact between an insulating film and a wiring member, enhancing the reliability of semiconductor devices.
Career Highlights
Yugo Tomita has worked with prominent companies in the semiconductor industry, including Tokyo Electron Limited and Zeon Corporation. His experience in these organizations has allowed him to develop and refine his innovative ideas in plasma processing technology.
Collaborations
He has collaborated with notable coworkers such as Naoki Matsumoto and Takenao Nemoto, contributing to various projects that have furthered advancements in semiconductor manufacturing.
Conclusion
Yugo Tomita's contributions to plasma processing technology and his innovative patents have made a significant impact in the semiconductor industry. His work continues to influence the development of more efficient manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.