Yuanxiang Zou

Title: Yuanxiang Zou: Semiconductor Memory and Metrology Inventor.

Introduction

Yuanxiang Zou is an inventor based in Wuhan, China. His patent work concerns three-dimensional memory devices and methods for measuring the geometry of holes in semiconductor chips. He is associated with Yangtze Memory Technologies Co., Ltd.

Latest Patents

Zou’s listed patent portfolio includes 3 patents. Among his latest patents is “3D Memory Device, Measurement Method Thereof, and Film Measurement Device.” The invention describes a three-dimensional memory device with a stack structure comprising a first stack and a second stack above it, as well as a barrier layer in a channel hole in the first stack.

Another listed patent, “Systems and Methods for Semiconductor Chip Hole Geometry Metrology,” addresses model-based measurement of hole geometry in semiconductor chips. The disclosed method trains a model using paired optical spectrum signals and reference signals for the same hole structures. It adjusts model parameters based on the difference between labeled and estimated geometric attributes.

Career Highlights

Zou’s disclosed inventions focus on semiconductor manufacturing and measurement. His work connects memory-device structures with metrology techniques that use optical signals and trained models to estimate chip features.

Collaborations

Zou is associated with Yangtze Memory Technologies Co., Ltd. His listed coworkers include Yi Zhou and Le Wang.

Conclusion

Yuanxiang Zou’s patent work reflects contributions to three-dimensional memory technology and semiconductor chip metrology, with a focus on device structures and precise measurement methods.