The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 2021
Filed:
Apr. 30, 2020
Yangtze Memory Technologies Co., Ltd., Wuhan, CN;
Le Wang, Wuhan, CN;
Yuanxiang Zou, Wuhan, CN;
Jun Zhang, Wuhan, CN;
Wei Zhang, Wuhan, CN;
Yi Zhou, Wuhan, CN;
YANGTZE MEMORY TECHNOLOGIES CO., LTD., Wuhan, CN;
Abstract
Embodiments of systems and methods for measuring a geometric attribute of a hole structure in a semiconductor chip are disclosed. In an example, an optical spectrum signal corresponding to the hole structure in the semiconductor chip is received. The optical spectrum signal is characterized by one or more optical features. The geometric attribute of the hole structure is determined based, at least in part, on the optical features using a model. The model is trained from a plurality of training samples each including a pair of an optical spectrum signal and a labeled reference signal both corresponding to a same hole structure.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile