Yuan-Hsuan Chen

Title: Innovations by Yuan-Hsuan Chen

Introduction

Yuan-Hsuan Chen is a notable inventor based in Tainan, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in wafer thinning technologies. With a total of 3 patents to his name, his work has had a considerable impact on the industry.

Latest Patents

Yuan-Hsuan Chen's latest patents include a "Wafer thinning apparatus having feedback control." This innovative apparatus features a first metrology tool designed to measure the initial thickness of a wafer. It incorporates a controller that calculates the polishing time based on the material removal rate, a predetermined thickness, and the initial thickness of the wafer. Additionally, the apparatus includes a polishing tool that polishes the wafer for a duration equal to the calculated polishing time. A second metrology tool measures the polished thickness, allowing the controller to update the material removal rate and calculate an etching time for the polished wafer.

Another patent, "Wafer thinning apparatus having feedback control and method of using," further elaborates on the wafer thinning process. This apparatus also includes a first metrology tool for measuring the initial thickness and a controller that determines the polishing time based on various parameters. The polishing tool is connected to the controller and polishes the wafer for a specified period. The second metrology tool measures the polished thickness, enabling the controller to update the material removal rate accordingly.

Career Highlights

Yuan-Hsuan Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work focuses on enhancing wafer thinning processes, which are crucial for the production of advanced semiconductor devices.

Collaborations

Yuan-Hsuan Chen has collaborated with notable colleagues such as Kei-Wei Chen and Ying-Lang Wang. Their combined expertise contributes to the innovative advancements in semiconductor manufacturing technologies.

Conclusion

Yuan-Hsuan Chen's contributions to wafer thinning technology exemplify the importance of innovation in the semiconductor industry. His patents reflect a commitment to improving manufacturing processes and enhancing product quality.