Company Filing History:
Years Active: 2024-2025
Title: Yu-Tse Lai: Innovator in Semiconductor Technology
Introduction
Yu-Tse Lai is a prominent inventor based in Zhubei, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 7 patents. His innovative work focuses on improving critical dimension uniformity and developing advanced processing systems for semiconductor substrates.
Latest Patents
Among his latest patents is a critical dimension uniformity (CDU) control method and semiconductor substrate processing system. This method involves gathering a first CDU by a first critical dimension from a first wafer after processing. It includes determining a first calibration process that incorporates various correction steps to address reticle-dependent, time-dependent, and process-dependent deviations. Another notable patent is the self-aligned cut-metal layer method, which provides techniques for forming self-aligned vias and devices. This method includes forming a first via on a conductive layer and aligning it with the first line end of the conductive layer through a selective removal process.
Career Highlights
Yu-Tse Lai is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in advancing the technology used in semiconductor manufacturing processes.
Collaborations
He has collaborated with notable coworkers, including Shih-Ming Chang and Ya Hui Chang, contributing to various innovative projects within the company.
Conclusion
Yu-Tse Lai's contributions to semiconductor technology through his patents and collaborative efforts highlight his role as a key innovator in the field. His work continues to influence advancements in semiconductor manufacturing processes.