This inventor holds 4 USPTO granted patents. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2014-2018.
Company Filing History:
Years Active: 2014-2018
Title: Yu-Ting Hsu: Innovator in Micro-Electro-Mechanical Systems
Introduction
Yu-Ting Hsu is a prominent inventor based in Zhubei, Taiwan. He has made significant contributions to the field of Micro-Electro-Mechanical Systems (MEMS), holding a total of 4 patents. His work focuses on innovative methods for manufacturing motion sensor devices and MEMS technologies.
Latest Patents
Yu-Ting Hsu's latest patents include a method of manufacturing a motion sensor device. This Micro-Electro-Mechanical System (MEMS) device features a sensing element and a proof mass that overlaps a portion of the sensing element. The proof mass is designed to be movable toward the sensing element, with a protection region formed between them. This protection region overlaps a first portion of the sensing element while not overlapping a second portion.
Another notable patent is a method for fabricating MEMS devices that have a plurality of cavities. This method involves forming recesses in two layers, with the recesses of the second layer being complementary to those of the first layer. An intermediate layer is bonded onto the second layer, which includes through-holes corresponding to the recesses. The first layer is then bonded to the intermediate layer, creating cavities that serve as operating environments for MEMS devices, with the two cavities maintaining different pressures.
Career Highlights
Yu-Ting Hsu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to advance his research and development in MEMS technologies. His innovative approaches have positioned him as a key figure in the semiconductor industry.
Collaborations
Yu-Ting Hsu collaborates with notable colleagues, including Shyh-Wei Cheng and Hsi-Cheng Hsu, who contribute to his research endeavors and the development of new technologies.
Conclusion
Yu-Ting Hsu's work in the field of Micro-Electro-Mechanical Systems exemplifies innovation and dedication. His patents reflect a commitment to advancing technology in motion sensing and MEMS fabrication. His contributions are significant to the ongoing evolution of the semiconductor industry.