The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2015
Filed:
Jan. 18, 2012
Shyh-wei Cheng, Zhudong Township, TW;
Yu-ting Hsu, Zhubei, TW;
Hsi-cheng Hsu, Taichung, TW;
Chih-yu Wang, Taichung, TW;
Jui-chun Weng, Taipei, TW;
Che-jung Chu, Hsin-Chu, TW;
Shyh-Wei Cheng, Zhudong Township, TW;
Yu-Ting Hsu, Zhubei, TW;
Hsi-Cheng Hsu, Taichung, TW;
Chih-Yu Wang, Taichung, TW;
Jui-Chun Weng, Taipei, TW;
Che-Jung Chu, Hsin-Chu, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
A Micro-Electro-Mechanical System (MEMS) device includes a sensing element, and a proof mass over and overlapping at least a portion of the sensing element. The proof mass is configured to be movable toward the sensing element. A protection region is formed between the sensing element and the proof mass. The protection region overlaps a first portion of the sensing element, and does not overlap a second portion of the sensing element, wherein the first and the second portions overlap the proof mass.