Taipei, Taiwan

Yu-Shan Su


Average Co-Inventor Count = 2.8

ph-index = 1

Forward Citations = 5(Granted Patents)


Company Filing History:


Years Active: 2016-2021

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5 patents (USPTO):Explore Patents

Title: Innovations of Yu-Shan Su

Introduction

Yu-Shan Su is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of five patents. His work focuses on advanced manufacturing methods that enhance the performance and reliability of semiconductor devices.

Latest Patents

One of Yu-Shan Su's latest patents is a manufacturing method of an isolation structure. This method involves several steps, including providing a semiconductor substrate, forming a trench, and performing a film forming process to create a dielectric layer. The process also includes an annealing step to densify the dielectric layer, resulting in a second dielectric layer that is thinner than the first. Additionally, a second film forming process is conducted to fill the trench with the second and third dielectric layers.

Another notable patent is related to a method for fabricating semiconductor devices. This method outlines the steps of providing a substrate with a memory region and a periphery region, forming trenches of varying widths, and applying surface treatment processes to lower stress in the liners. The final steps involve planarizing the liners to create isolation structures.

Career Highlights

Yu-Shan Su has worked with leading companies in the semiconductor industry, including United Microelectronics Corporation and Fujian Jinhua Integrated Circuit Co., Ltd. His experience in these organizations has allowed him to develop innovative solutions that address the challenges faced in semiconductor manufacturing.

Collaborations

Throughout his career, Yu-Shan Su has collaborated with several talented individuals, including Chia-Wei Wu and Ting-Pang Chung. These collaborations have contributed to the advancement of semiconductor technologies and the successful development of his patented methods.

Conclusion

Yu-Shan Su's contributions to semiconductor technology through his innovative patents and collaborations highlight his importance in the field. His work continues to influence the industry and pave the way for future advancements in semiconductor manufacturing.

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