The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 2019
Filed:
Feb. 12, 2018
United Microelectronics Corp., Hsin-Chu, TW;
Fujian Jinhua Integrated Circuit Co., Ltd., Quanzhou, Fujian Province, CN;
Yu-Shan Su, Taipei, TW;
Chia-Wei Wu, Taichung, TW;
UNITED MICROELECTRONICS CORP., Hsin-Chu, TW;
Fujian Jinhua Integrated Circuit Co., Ltd., Quanzhou, Fujian Province, CN;
Abstract
A method of forming a dynamic random access memory (DRAM) includes the following steps. A substrate includes a memory area and a logic area. A stacked structure is formed on the substrate of the memory area and a gate structure is formed on the substrate of the logic area. A first mask layer is formed on the stacked structure and the gate structure. A densification process is performed to densify the first mask layer. A second mask layer is formed on the first mask layer. A part of the second mask layer and a part of the first mask layer are removed to form a first spacer on sidewalls of the gate structure.