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Yu-Lun Lin

USPTO Granted Patents = 5

Average Co-Inventor Count = 2.9

ph-index = 3

Forward Citations = 16(Granted Patents)

Location History:

Taipei, TW (2001 - 2002)
Hsin-Chu, TW (2003)

Company Filing History:

5 out of 40,780

Taiwan Semiconductor Manufacturing Comp. Ltd.

Years Active: 2001-2003

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5 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6595370 - Apparatus and method for reducing contamination in a wafer transfer chamber (2003-07-22),

2. 6498106 - Prevention of defects formed in photoresist during wet etching (2002-12-24),

3. 6475917 - Method to reduce the metal TiN ARC damage in etching back process (2002-11-05),

4. 6203659 - Method and apparatus for controlling the quality of a photoresist stripper bath (2001-03-20),

5. 6184116 - Method to fabricate the MOS gate (2001-02-06),

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