Company Filing History:
Years Active: 2020-2024
Title: Innovations of Yu Lun Ke: A Pioneer in Semiconductor Technology
Introduction: Yu Lun Ke is an accomplished inventor based in Hsinchu, Taiwan, known for his significant contributions to semiconductor technology. With a total of six patents to his name, he has made strides in improving interconnect systems and enhancing the performance of dielectric materials.
Latest Patents: Among Yu Lun Ke's latest patents is the development of an interconnect system featuring improved low-k dielectrics. This patent provides methods for forming low-k dielectric materials intended for use as intermetal dielectrics in multilevel interconnect systems, elaborating on their chemical and physical properties. The deposition techniques discussed include Plasma-Enhanced Chemical Vapor Deposition (PECVD), Plasma-Enhanced Atomic Layer Deposition (PEALD), and Atomic Layer Deposition (ALD). Notably, precursors such as Tetraethyl Orthosilicate (TEOS) and Methyl Diethoxysilane (MDEOS) are identified as key elements in these processes, with various configurations utilizing oxygen gas (Ogas) to enhance reaction efficacy.
Another significant patent by Yu Lun Ke addresses etch profile control of interconnect structures. This methodology involves several complex steps, including the formation of an etch stop layer, a metal oxide layer, and an interlayer dielectric layer on the substrate, culminating in trench etch openings designed to optimize semiconductor structure fabrication.
Career Highlights: Yu Lun Ke's professional journey is intertwined with his role at Taiwan Semiconductor Manufacturing Company Limited (TSMC), where he has played a crucial role in advancing semiconductor technologies. His expertise in dielectric materials and etching techniques is essential to TSMC's reputation as a leader in the semiconductor manufacturing sector.
Collaborations: In his innovative endeavors, Yu Lun Ke has collaborated with esteemed colleagues, including Yi-Wei Chiu and Yu-Chi Lin. These partnerships have contributed to the development of cutting-edge technologies, further emphasizing the collaborative spirit prevalent in semiconductor research.
Conclusion: Yu Lun Ke is a remarkable inventor shaping the future of semiconductor technology through his patented innovations. His work not only enhances interconnect systems but also sets the stage for future advancements in the field. With continued collaboration and research, Yu Lun Ke's contributions are expected to have lasting impacts on the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.