Location History:
- Taipei, TW (2004 - 2005)
- Hsin-Chu, TW (2004 - 2007)
Company Filing History:
Years Active: 2004-2007
Title: An Insight into the Innovations of Inventor Yu-Huei Chen
Introduction
Yu-Huei Chen is a prominent inventor based in Hsin-Chu, Taiwan, known for his significant contributions to the field of semiconductor technology. With a total of six patents under his name, Chen has made impactful advancements that enhance the efficiency and quality of chemical mechanical polishing processes in semiconductor manufacturing.
Latest Patents
Among Chen's latest innovations are two notable patents. The first is titled "EBR shape of spin-on low-k material providing good film stacking," which introduces a new method for tuning the Edge Bead Remove hump. This invention aims to prevent the formation of pointed edges, thereby avoiding the peeling of low-k dielectric films during the Chemical Mechanical Polishing process. The second patent, "Method and system for in-situ monitoring of mixing ratio of high selectivity slurry," details a novel approach to monitor the quality of slurries used in polishing operations. By utilizing laser light to evaluate the slurry’s mixing ratio and overall quality, this method enhances the reliability of the polishing process.
Career Highlights
Yu-Huei Chen works at the Taiwan Semiconductor Manufacturing Company Limited (TSMC), where he applies his innovative ideas to improve manufacturing processes. His expertise lies in semiconductor technology, and his patents reflect a commitment to advancing this critical industry.
Collaborations
Throughout his career, Chen has collaborated with notable colleagues such as Lain-Jong Li and fellow inventor Sung-Ming Jang. Their teamwork and combined expertise contribute to the ongoing success and innovation found within TSMC.
Conclusion
In summary, Yu-Huei Chen is a visionary inventor whose work in semiconductor technology is shaping the future of manufacturing processes. With his latest patents focused on improving the efficiency and quality of chemical mechanical polishing, he continues to play a vital role in advancing the field. His collaborations with esteemed colleagues highlight the importance of teamwork in driving technological innovations.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.