Location History:
- Hsin-Chu, TW (2020)
- Tainan, TW (2019 - 2022)
Company Filing History:
Years Active: 2019-2022
Title: Innovations of Yu-Ho Ni
Introduction
Yu-Ho Ni is a prominent inventor based in Tainan, Taiwan. He has made significant contributions to the field of technology, particularly in the area of wafer processing. With a total of 6 patents to his name, his work has had a considerable impact on the industry.
Latest Patents
One of Yu-Ho Ni's latest patents is an apparatus and method for monitoring the relative relationship between the wafer and the chuck. This invention is designed to monitor whether the wafer is sticky on the chuck during the de-chucking process. The system utilizes lift pins that extend outside the chuck to separate the wafer and the chuck. By detecting the capacitance between the de-chucked wafer and the chuck, it can determine if the wafer is sticky or improperly supported. An early alarm can be issued if issues are detected, enhancing the reliability of the process.
Another notable patent is related to wafer charges monitoring. This invention proposes an apparatus and method for monitoring the charges on a wafer. It includes a conductive pin, a conductive spring, and a conductive line that connect the backside surface of the wafer to a sample conductor. This setup ensures that both surfaces have identical charge density, allowing for effective monitoring of the wafer's charges. The design minimizes contamination risks by positioning the sample conductor and static electricity sensor outside the processing chamber.
Career Highlights
Yu-Ho Ni is currently associated with Advanced Ion Beam Technology, Inc., where he continues to innovate and develop new technologies. His work has been instrumental in advancing the capabilities of wafer processing techniques.
Collaborations
He has collaborated with notable coworkers such as Chun-Chin Kang and Te-Min Wang, contributing to various projects and innovations in the field.
Conclusion
Yu-Ho Ni's contributions to technology through his patents and innovations have significantly advanced the field of wafer processing. His work continues to influence the industry and inspire future developments.