Location History:
- Taipei, TW (2006 - 2012)
- Tainan, TW (2016)
- Pingtung, TW (2020 - 2022)
Company Filing History:
5 out of 40,780 
1 out of 45 Years Active: 2006-2022
Title: Exploring the Innovations of Inventor Yu-Chih Chen
Introduction
Yu-Chih Chen is a prominent inventor based in Pingtung, Taiwan, known for his contributions to the field of lithography technology. With a remarkable total of six patents to his name, Chen has made significant strides in the development of advanced semiconductor manufacturing processes.
Latest Patents
Among his most notable inventions is the EUV radiation source apparatus for lithography. This innovative apparatus includes an EUV collector mirror body characterized by a reflective layer that serves as its reflective surface. It is further enhanced by a heater that is either attached to or embedded within the mirror body, alongside a unique drain structure designed to effectively drain melted metal from the reflective surface to the back side of the mirror body. This technology plays a crucial role in enhancing the performance and efficiency of extreme ultraviolet lithography processes.
Career Highlights
Yu-Chih Chen has held significant positions in notable organizations, including Taiwan Semiconductor Manufacturing Company Limited and Taipei Veterans General Hospital. His work in these esteemed institutions has not only honed his expertise but also provided him with the platform to apply his innovative ideas in practical scenarios.
Collaborations
Throughout his career, Chen has collaborated with talented individuals such as Po-Chung Cheng and Li-Jui Chen. These professional relationships have fostered a creative environment that has further propelled his inventive spirit.
Conclusion
In summary, Yu-Chih Chen stands out as an influential figure in the realm of invention, particularly in semiconductor lithography. His six patents reflect his dedication to advancing technology and improving manufacturing processes, making him a vital contributor to the field.