Taiwan Semiconductor Manufacturing Comp. Ltd.

Taipei Veterans General Hospital

Yu-Chih Chen

Li-Jui Chen

Shang-Chieh Chien

Po-Chung Cheng

Sheng-Kang Yu

Wei-Chun Yen

Chi Ming Yang

Chia-Ching Tsai

Shih-Hwa Chiou

Szu-Hung Yang

Yi-Ping Yang

Hung-Lung Hu

Tung-Hu Tsai

Remaerd Hsieh

Tsung-Yun Liu

Jeng-Fan Lo

Fu-Ting Tsai

Chian-Shiu Chien

An EUV collector mirror for an extreme ultra violet (EUV) radiation source apparatus includes an EUV collector mirror body on which a reflective layer as a reflective surface is disposed, a heater attached to or embedded in the EUV collector mirror body and a drain structure to drain melted metal from the reflective surface of the EUV collector mirror body to a back side of the EUV collector mirror body.

EUV radiation source apparatus for lithography

An extreme ultraviolet (EUV) radiation source apparatus includes a collector and a target droplet generator for generating a tin (Sn) droplet. A debris collection device is disposed over a reflection surface of the collector, and at least one drip hole is located between the debris collection device and the collector. A tin bucket for collecting debris from the debris collection device is located below the at least one drip hole, and a tube or guide rod extends from the drip hole to the tin bucket.

EUV light source and apparatus for lithography

A semiconductor device with metal-doped etch stop layer therein and a method of manufacturing the same is disclosed. The method includes forming an semiconductor device with a interconnect structure that has a dielectric layer and a conductor therein, and an etch stop layer over the dielectric layer; applying a photo resist layer and patterning the photo resist layer to expose a portion of the etch stop layer on a top surface of the conductor over of the dielectric layer; and doping the exposed portion of the etch stop layer with an element to form a metal-doped etch stop layer. The formed metal-doped etch stop layer has a recess structure and functions as a conductive pad over the conductor.

Semiconductor structure and method of forming the same

The invention relates to a device for selecting stem cells with a serum free medium for amplification of stem cells. The invention also relates to a method of treating or preventing diseases caused by cancer-related stem cells. The invention further provides a method of enhancing radiosensitivity of cancer-related stem cells comprising radiotherapy with resveratrol, and the cancer-related stem cell has stronger drug resistance. The present invention further provides that resveratrol promotes differentiation and inhibits teratoma/tumor formation in induced pluripotent stem cells (iPS) and embryonic stem cells.

Medium and device for proliferation of stem cells and treatment of cancer-related stem cell with resveratrol

A new method and system of testing and classifying semiconductor devices is provided. User requirements are collected for this purpose, test specifications and test functions are defined for the to be tested DRAM devices. The Automatic Classification Shipping (ACS) data base is updated with test related data, the testing is performed whereby DRAM devices are assigned categories from with DRAM classes are derived. These identified classes are used to sort the tested DRAM devices in accordance with their tested functional performance characteristics.

Auto classification shipping system

Growing community of inventors

Pingtung, Taiwan

Yu-Chih Chen