Location History:
- Tokyo, JP (1995 - 1997)
- Machida, JP (1997)
Company Filing History:
3 out of 10,326 
1 out of 29 Years Active: 1995-1997
Title: Youichi Deguchi: Innovator in Plasma Processing Technology
Introduction
Youichi Deguchi is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 3 patents. His work has been instrumental in advancing the capabilities of semiconductor manufacturing processes.
Latest Patents
One of Deguchi's latest patents is a plasma processing apparatus. This apparatus comprises a first electrode on which an object to be processed is placed, and a second electrode facing the first. It includes a high-frequency power supply that generates power between the electrodes, a processing gas supply mechanism for plasma formation, and a bias potential detecting mechanism positioned near the object to be processed.
Another notable patent is a vacuum processing apparatus designed for film formation on semiconductor wafers. This apparatus features a processing chamber that operates under vacuum conditions, a mounting member with an electrostatic chuck for holding the semiconductor wafer, and a heating mechanism to ensure optimal processing conditions. The design incorporates multiple insulating layers and a conductive layer to enhance the efficiency of the electrostatic chuck.
Career Highlights
Throughout his career, Youichi Deguchi has worked with notable companies such as Tokyo Electron Limited and Tokyo Electron Tohoku Limited. His experience in these organizations has allowed him to refine his expertise in semiconductor processing technologies.
Collaborations
Deguchi has collaborated with several professionals in his field, including Mitsuaki Komino and Yoichi Ueda. These collaborations have contributed to the development of innovative solutions in plasma processing.
Conclusion
Youichi Deguchi's contributions to plasma processing technology and his innovative patents have significantly impacted the semiconductor industry. His work continues to influence advancements in manufacturing processes, showcasing the importance of innovation in technology.