Youbun Ito

Title: Youbun Ito: Innovator in Etching Technology

Introduction

Youbun Ito is a prominent inventor based in Chofu, Japan, known for his significant contributions to etching technology. With a total of 4 patents to his name, he has made remarkable advancements in the field, particularly in the development of methods that enhance the efficiency and effectiveness of etching processes.

Latest Patents

Youbun Ito's latest patents focus on innovative etching methods that improve the quality and precision of contact holes in semiconductor manufacturing. One of his notable inventions involves a lower electrode maintained at a temperature of 40°C within a processing chamber. This method utilizes a specific gas composition of C F : CH F : Ar=7:4:500 (sccm) while sustaining an atmospheric pressure of 50 mTorr. By applying high-frequency power at 1500 W and a frequency of 13.56 MHz, Ito generates plasma that forms a carbon film at the shoulder of an SiN film layer exposed inside a contact hole. This technique not only achieves a high aspect ratio but also prevents damage to the SiN film layer.

Another patent describes a processing gas composed of C F, O, and Ar, achieving a flow rate ratio of 1≤C F flow rate/O flow rate≤1.625. This gas is supplied into the processing chamber while maintaining an atmospheric pressure between 45 mTorr and 50 mTorr. By applying high-frequency power to a lower electrode at a temperature range of 20°C to 40°C, Ito successfully forms a contact hole at an SiO film on an SiNx film. The use of C F and O allows for near-perfect verticality in the contact hole and improves the selection ratio of the SiO2 film relative to the SiNx film, all while minimizing environmental impact.

Career Highlights

Youbun Ito has established himself as a key figure in the semiconductor industry through his work at Tokyo Electron Limited. His innovative approaches to etching technology have positioned him as a leader in the field, contributing to advancements that benefit the manufacturing processes of semiconductors.

Collaborations

Throughout his career, Ito has collaborated with talented individuals such as Masahiro Yamada and Kouichiro Inazawa. These partnerships have fostered an environment of innovation and creativity, leading to the development of cutting