This inventor holds 4 USPTO granted patents and 1 published patent application. Top assignee: Tokyo Electron Limited. Active years: 2015-2026.
Location History:
- Koshi, JP (2015)
- Kumamoto, JP (2021)
Company Filing History:
Years Active: 2015-2026
Title: Innovations by Yoshitomo Sato
Introduction
Yoshitomo Sato is a notable inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing, holding a total of 4 patents. His work focuses on improving the efficiency and effectiveness of substrate processing apparatuses.
Latest Patents
Yoshitomo Sato's latest patents include a substrate processing apparatus and a substrate processing method. The substrate processing apparatus features a brush processing section designed to perform brush processing on the surface of a substrate. It also includes a substrate reversal section that flips the substrate before and after the brush processing. Additionally, a substrate imaging section is incorporated to conduct pre-processing and post-processing imaging. The controller within the apparatus determines the quality of the substrate based on imaging results and adjusts processing conditions as necessary. Another patent describes a substrate processing apparatus that includes a cassette placing section, a processing unit, a transfer area, and an image capturing unit. This design allows for efficient washing or etching of the peripheral portions of substrates while capturing images of the processed substrates.
Career Highlights
Yoshitomo Sato is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His innovative designs and patents have contributed to advancements in substrate processing technology.
Collaborations
Yoshitomo has collaborated with notable coworkers such as Kazuyuki Tashiro and Shinichi Hatakeyama. Their teamwork has fostered a creative environment that encourages innovation and the development of cutting-edge technologies.
Conclusion
Yoshitomo Sato's contributions to substrate processing technology through his patents and collaborations highlight his role as a significant inventor in the field. His work continues to influence advancements in the industry.
