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Yoshitomo Sato

USPTO Granted Patents = 3

Average Co-Inventor Count = 2.0

ph-index = 2

Forward Citations = 5(Granted Patents)

Location History:

Koshi, JP (2015)
Kumamoto, JP (2021)

Company Filing History:

3 out of 10,341

Tokyo Electron Limited

Years Active: 2015-2021

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3 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 11094569 - Substrate processing apparatus (2021-08-17),

2. 9082614 - Periphery coating apparatus, periphery coating method and storage medium therefor (2015-07-14),

3. 9027508 - Periphery coating apparatus, periphery coating method and storage medium therefor (2015-05-12),

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