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Kumamoto, Japan

Yoshinori Ikeda

USPTO Granted Patents = 11 (Patent Applications = 2)

Average Co-Inventor Count = 3.3

ph-index = 1

Forward Citations = 6(Granted Patents)

Location History:

Kumamoto, JP (2016 - 2023)
Koshi, JP (2016 - 2024)

Company Filing History:

11 out of 10,295

Tokyo Electron Limited

Years Active: 2016-2025

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11 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12459009 - Substrate processing apparatus and substrate processing method (2025-11-04),

2. 12249533 - Substrate processing apparatus (2025-03-11),

3. 11955365 - Substrate processing method and substrate processing apparatus (2024-04-09),

4. 11742232 - Substrate processing method and substrate processing apparatus (2023-08-29),

5. 11373883 - Substrate processing apparatus, substrate processing system and substrate processing method (2022-06-28),

6. 10892176 - Substrate processing apparatus having top plate with through hole and substrate processing method (2021-01-12),

7. 10832902 - Substrate processing apparatus and substrate processing method (2020-11-10),

8. 9764345 - Substrate processing apparatus and nozzle cleaning method (2017-09-19),

9. 9470979 - Developing treatment apparatus and developing treatment method (2016-10-18),

10. 9387520 - Liquid processing apparatus and cleaning method (2016-07-12),

11. 9304398 - Developing treatment apparatus and developing treatment method (2016-04-05),

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