Location History:
- Nirasaki, JP (2012 - 2015)
- Kurokawa-gun, JP (2023)
- Miyagi, JP (2015 - 2024)
Company Filing History:
19 out of 10,295 
1 out of 439 
1 out of 101 Years Active: 2012-2025
Title: Innovations and Contributions of Yohei Uchida in Plasma Processing Technologies
Introduction
Yohei Uchida, an accomplished inventor based in Miyagi, Japan, has made significant contributions to the field of plasma processing technologies with a portfolio of 19 patents. His innovative spirit and technical expertise have led to advancements that enhance the efficiency and effectiveness of various applications in semiconductor manufacturing.
Latest Patents
Uchida's most recent patents showcase his innovative approach in designing essential components for plasma processing equipment. Notable among these are the **Electrostatic Chuck**, **Focus Ring**, **Support Base**, **Plasma Processing Apparatus**, and a comprehensive **Plasma Processing Method**. The electrostatic chuck allows for precise substrate handling, featuring distinct regions that ensure effective substrate support and separation. Additionally, the plasma processing apparatus includes a specialized chamber design that optimizes performance through innovative configurations of wall and ground members.
Career Highlights
Throughout his career, Yohei Uchida has collaborated with prominent companies in the semiconductor industry, notably **Tokyo Electron Limited** and **Fujikin Inc.**. His work has been instrumental in advancing technology that serves critical functions in manufacturing processes, particularly in enhancing plasma processing capabilities.
Collaborations
Uchida has worked alongside esteemed colleagues, including Yasuharu Sasaki and Tetsuji Sato. Their collaborative efforts have undoubtedly contributed to the innovative breakthroughs and advancements that Uchida is known for today, leveraging their combined expertise in the field.
Conclusion
Yohei Uchida's dedication to innovation in plasma processing technologies is evidenced by his extensive patent portfolio. His contributions underscore the importance of continuous research and development in creating solutions that drive the semiconductor industry forward. With a growing list of patents and collaborations, Uchida remains a significant figure in the realm of innovations and inventions.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.