Ying-Chieh Meng

Title: Ying-Chieh Meng: Semiconductor Process and Ion Implantation Inventor.

Introduction

Ying-Chieh Meng is an inventor based in Taichung, Taiwan. His work includes inventions related to ion implantation equipment and semiconductor manufacturing systems. He is associated with Taiwan Semiconductor Manufacturing Company Limited and holds 5 patents.

Latest Patents

Among Meng’s latest patents is “Ion Generators of Ion Implanters with Movable Repeller.” The invention describes an ion generator with an arc chamber, a filament that generates thermal electrons, a cathode that produces secondary electrons, and a repeller that can move relative to the arc chamber housing.

Another patent, “Wet Processing System and System and Method for Manufacturing Semiconductor Structure,” describes a system for processing semiconductor wafers. It includes a load lock chamber, chambers for processing multiple wafers, chambers for processing individual wafers, and a robot that transports wafers between the load lock and processing chambers.

Career Highlights

Meng’s patent portfolio reflects work on equipment and systems used in semiconductor fabrication. His inventions address both ion generation for implanters and wafer handling and processing.

Collaborations

Meng’s listed coworkers include Chui-Ya Peng and Nai-Han Cheng. His work is associated with Taiwan Semiconductor Manufacturing Company Limited.

Conclusion

Ying-Chieh Meng’s inventions contribute to semiconductor manufacturing through developments in ion implantation and wafer processing systems.