The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2025
Filed:
May. 26, 2022
Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;
Ying-Chieh Meng, Taichung, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu, TW;
Abstract
A semiconductor structure manufacturing system is provided. The system includes a load lock chamber, first chambers, second chambers and a first robot. The load lock chamber is configured to store wafers that are to be processed. The first chambers are configured to process the wafers. Each of the first chambers has first stage plates for supporting the wafers. The second chambers are configured to process a single wafer. Each of the second chambers has a second stage plate for supporting a wafer. The first robot is configured to transport the wafers from the load lock chamber to the first chambers. The first robot is arranged between the first chambers, the second chambers and the load lock chamber.