Company Filing History:
Years Active: 2005-2011
Title: Yih-Hsiung Lin: Innovator in Semiconductor Technology
Introduction
Yih-Hsiung Lin is a prominent inventor based in Sanchung, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on enhancing the performance and reliability of semiconductor structures.
Latest Patents
One of his latest patents is related to the surface treatment of metal interconnect lines. This invention involves an apparatus for forming a semiconductor structure that includes a first layer on top of a substrate. The first layer defines conductive regions, such as copper interconnect lines, and non-conductive regions, such as dielectric materials. The conductive regions are then covered by a second layer of a different material, such as nickel. The structure undergoes heat treatment, allowing the interconnect lines and the second metal to interact and form an alloy layer. This alloy layer exhibits superior qualities for adhering to both the copper interconnect lines and subsequently deposited dielectric materials.
Another notable patent by Lin is the integration film scheme for copper/low-k interconnects. This invention describes a structure for a multi-level interconnect inter-level dielectric layer (ILD) and a method of manufacturing it. The ILD layer consists of multiple low-dielectric constant material sub-layers, each with distinct material properties. The first, second, and third sub-layers are preferably made of the same material, deposited continuously while adjusting deposition conditions.
Career Highlights
Yih-Hsiung Lin is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His innovative work has positioned him as a key figure in advancing semiconductor technology.
Collaborations
Lin has collaborated with notable colleagues, including Wen-Kai Wan and Baw-Ching Perng, contributing to various projects that enhance semiconductor performance.
Conclusion
Yih-Hsiung Lin's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the field. His work continues to impact the industry positively.