Yi Xu

Title: Unveiling the Innovations of Inventor Yi Xu

Introduction:

Inventor Yi Xu, based in San Jose, CA, has made significant contributions to the field of semiconductor technology. With an impressive portfolio of 20 patents, his work at Applied Materials, Inc. showcases his expertise in low-temperature tungsten deposition and plasma pre-clean processes.

Latest Patents:

Yi Xu's latest patents demonstrate his ingenuity in enhancing semiconductor fabrication processes. One notable invention is the selective tungsten deposition at low temperatures, where he devised methods for depositing tungsten films with controlled gas ratios and minimized roughness, stress, and impurity levels.

Another groundbreaking patent is the low-temperature plasma pre-clean for selective gap fill, where Yi Xu pioneered methods for pre-cleaning substrates using oxygen plasma treatments at temperatures below 100°C. This innovative approach helps to remove impurities and repair surface defects in semiconductor features.

Career Highlights:

Working at Applied Materials, Inc., Yi Xu has established himself as a visionary inventor in the semiconductor industry. His expertise in developing advanced deposition and cleaning processes has contributed significantly to the company's technological advancements.

Collaborations:

Yi Xu has collaborated with esteemed colleagues at Applied Materials, Inc., including Yu Lei and Kazuya Daito. Together, they have worked on cutting-edge projects that have shaped the future of semiconductor manufacturing.

Conclusion:

Inventor Yi Xu's pioneering work in low-temperature tungsten deposition and plasma pre-clean processes underscores his commitment to innovation in the semiconductor industry. His patents not only demonstrate technical excellence but also highlight his dedication to advancing semiconductor technology for the benefit of society.