Yi Hao Ng

Title: **Inventor Spotlight: Yi Hao Ng**

Introduction

Yi Hao Ng is an accomplished inventor based in Miyagi, Japan, known for his contributions to substrate processing technology. With a solid background in engineering and innovative thinking, Ng has made significant strides in developing advanced techniques for substrate processing in the semiconductor industry.

Latest Patents

Ng holds a patent for a "Substrate Processing Method and Substrate Processing Apparatus," which describes a novel method performed in a chamber of a substrate processing apparatus. This patent details a process that includes placing a substrate on a substrate support, supplying a first processing gas, and utilizing an RF signal while applying a negative DC voltage to the upper electrode to generate plasma from the gas. The unique aspect of Ng's invention is the alternation between supplying pulsed RF signals and maintaining the negative DC voltage, allowing for efficient plasma generation within a brief processing time.

Career Highlights

Yi Hao Ng is affiliated with Tokyo Electron Limited, where he leverages his expertise to enhance the performance and efficiency of substrate processing systems. His innovative approach and practical solutions have positioned him as a valuable asset to the company, contributing to advancements in semiconductor manufacturing.

Collaborations

Ng has collaborated with notable coworkers such as Seiichi Watanabe and Kazuki Narishige, working together to push the boundaries of existing technologies and explore new possibilities in the field of substrate processing. Their combined expertise and innovative spirit have facilitated the development of cutting-edge solutions in semiconductor production.

Conclusion

With a patent that addresses crucial techniques in substrate processing, Yi Hao Ng stands out as a significant contributor to semiconductor technology. His work at Tokyo Electron Limited and collaborations with other talented professionals underscore his commitment to innovation and excellence in engineering. As the industry evolves, Ng's contributions will likely continue to play a vital role in shaping the future of substrate processing.