Yen-Hung Chen

Title: Yen-Hung Chen: Innovator in Semiconductor Technology

Introduction

Yen-Hung Chen is a prominent inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 8 patents. His work focuses on methods that enhance the efficiency and accuracy of semiconductor structures.

Latest Patents

Among his latest patents, Chen has developed a method for forming a semiconductor structure and overlay error estimation. This method involves creating a first overlay feature in a dielectric layer over a wafer, followed by the formation of a second dielectric layer. The process includes using an exposure tool to create an opening in the second dielectric layer and directing an electron beam to detect overlay errors. Another notable patent is for forming a device with a capped through-substrate via (TSV) structure. This device features a dielectric layer on a semiconductor substrate, a gate electrode, and a TSV structure that includes a conductive layer and a capping layer made of cobalt.

Career Highlights

Chen has worked with leading companies in the semiconductor industry, including Taiwan Semiconductor Manufacturing Company Ltd. and Hc Photonics Corporation. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking innovations in semiconductor technology.

Collaborations

Throughout his career, Chen has collaborated with talented individuals such as Yung-Chi Lin and Wen-Chih Chiou. These partnerships have fostered an environment of innovation and creativity, leading to advancements in their respective fields.

Conclusion

Yen-Hung Chen's contributions to semiconductor technology are noteworthy, with a strong portfolio of patents that reflect his expertise and innovative spirit. His work continues to influence the industry and pave the way for future advancements.