Yen-Hsing Chen

Title: Yen-Hsing Chen: Innovator in Semiconductor Technology

Introduction

Yen-Hsing Chen is a notable inventor based in Nantou, Taiwan. He has made significant contributions to the field of semiconductor processing, holding a total of 2 patents. His work focuses on improving the efficiency and effectiveness of deposition tools used in semiconductor manufacturing.

Latest Patents

Chen's latest patents include innovative technologies that enhance semiconductor processing. One of his patents is titled "Semiconductor processing tool and methods of operation." This invention provides techniques and apparatuses for determining the performance of a dry-clean operation within a deposition tool. The cleaning-control subsystem of the deposition tool incorporates a gas concentration sensor and a temperature sensor to monitor the dry-clean operation. This data is crucial for assessing the efficiency of the cleaning process.

Another significant patent is the "Truncated dummy plate for process furnace." This invention promotes uniform flow of process gases across the substrate surface, facilitating the deposition of films with consistent thickness. The design features a circular shape with a flat edge, allowing for optimal gas distribution during the LPCVD process.

Career Highlights

Yen-Hsing Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this prestigious company has allowed him to contribute to advancements in semiconductor technology.

Collaborations

Chen has collaborated with several talented individuals in his field, including Hsing-Jui Lee and Fu-Kuo Tseng. These collaborations have further enriched his research and development efforts.

Conclusion

Yen-Hsing Chen is a prominent figure in semiconductor innovation, with a focus on enhancing deposition processes. His patents reflect his commitment to advancing technology in this critical industry.