Company Filing History:
Years Active: 2018-2020
Title: Yen-Chan Lo: Innovator in Thermal Chemical Vapor Deposition Technology
Introduction
Yen-Chan Lo is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in thermal chemical vapor deposition systems. With a total of 3 patents to his name, his work has been instrumental in advancing technology in this area.
Latest Patents
Yen-Chan Lo's latest patents include a thermal chemical vapor deposition system and its operating method. This innovative system features a bottom chamber, an upper chamber, a workpiece support, a heater, and at least one shielding plate. The design allows for efficient heat application to the workpiece while minimizing heat exposure to the bottom chamber. Another notable patent is the deposition device structure, which includes a heater and a shower head designed to optimize the deposition process. The shower head has a unique design with varying surface textures to enhance performance.
Career Highlights
Yen-Chan Lo is currently employed at Taiwan Semiconductor Manufacturing Company Ltd., a leading firm in the semiconductor industry. His work at this company has allowed him to develop and refine his innovative technologies, contributing to the company's reputation for excellence in manufacturing.
Collaborations
Yen-Chan Lo has collaborated with several talented individuals in his field, including Yi-Fang Lai and Po-Hsiung Leu. These collaborations have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.
Conclusion
Yen-Chan Lo's contributions to thermal chemical vapor deposition technology highlight his role as a key innovator in the semiconductor industry. His patents and collaborative efforts continue to influence advancements in manufacturing processes.