This inventor holds 2 USPTO granted patents. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2014-2016.
Company Filing History:
Years Active: 2014-2016
Title: Yeh-Tseng Li: Innovator in Semiconductor Technology
Introduction
Yeh-Tseng Li is a prominent inventor based in Zhubei, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His innovative methods have advanced the development of semiconductor devices and MEMS nanostructures.
Latest Patents
One of his latest patents is titled "Method of forming a semiconductor device." This method involves depositing a light reflecting layer over a substrate, followed by the formation of a protection layer over the light reflecting layer. Additionally, an anti-reflective coating (ARC) layer is formed over the protection layer, and an opening is created in the ARC layer, exposing the substrate. The method also includes removing the ARC layer in a wet solution comprising H2O2, with the ARC layer being exposed to the H2O2 at a flow rate greater than about 10 standard cubic centimeters per minute (sccm).
Another notable patent is "MEMS nanostructures and methods of forming the same." This method includes recessing a portion of a substrate to form a plurality of mesas. Each mesa has a top surface and a sidewall surface. A light reflecting layer is deposited over the substrate, covering both the top and sidewall surfaces of each mesa. A protection layer and an ARC layer are formed over the light reflecting layer. Openings in a photo resist layer are created over the ARC layer on each mesa, allowing for the removal of portions of the ARC layer, protection layer, and light reflecting layer to expose the top surface of each mesa.
Career Highlights
Yeh-Tseng Li works at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in pushing the boundaries of semiconductor technology, making him a valuable asset to his company.
Collaborations
He has collaborated with notable coworkers such as Yi-Shao Liu and Allen Timothy Chang, contributing to various projects that enhance semiconductor manufacturing processes.
Conclusion
Yeh-Tseng Li's innovative work in semiconductor technology and MEMS nanostructures showcases his expertise and commitment to advancing the field. His contributions are significant in shaping the future of semiconductor devices.