Yayi Wei

Title: Yayi Wei: Innovator in Semiconductor Manufacturing

Introduction

Yayi Wei is a prominent inventor based in Beijing, China. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 3 patents. His innovative approaches have advanced the technology used in this critical industry.

Latest Patents

Yayi Wei's latest patents include a method for manufacturing semiconductor devices. This method involves forming a photolithographic coating on a to-be-connected structure, which includes a first film, a photolithographic film, and a second film. The refractive indexes of the first and second films are smaller than 1. The coating is exposed to light of a first wavelength to image the structure to a first region of the photolithographic film. It is then exposed to light of a second wavelength through a mask to image the mask to a second region of the photolithographic film. The overlap of these regions creates a connection region, facilitating self-alignment between layers.

Another notable patent is a method and device for optimizing mask parameters. This method includes acquiring a test pattern, light source parameters, and initial mask parameters. It generates multiple sets of candidate mask parameters based on the initial mask sidewall angle. By simulating these parameters, the optimal mask sidewall angle is determined, significantly improving imaging contrast and resolution.

Career Highlights

Yayi Wei is affiliated with the Chinese Academy of Sciences, where he conducts his research and development. His work has been instrumental in enhancing semiconductor manufacturing processes, making them more efficient and effective.

Collaborations

Yayi Wei collaborates with notable colleagues, including Libin Zhang and Zhen Song. Their combined expertise contributes to the advancement of semiconductor technologies.

Conclusion

Yayi Wei's innovative work in semiconductor manufacturing has led to significant advancements in the field. His patents reflect a commitment to improving technology and efficiency in semiconductor devices.