Tokyo, Japan

Yasuyuki Kobayakawa


Average Co-Inventor Count = 5.1

ph-index = 1

Forward Citations = 2(Granted Patents)


Company Filing History:


Years Active: 2005-2006

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2 patents (USPTO):Explore Patents

Title: Innovations by Yasuyuki Kobayakawa

Introduction

Yasuyuki Kobayakawa is a notable inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor processing through his innovative patents. With a total of 2 patents, his work focuses on improving the efficiency and effectiveness of processing solutions used in semiconductor manufacturing.

Latest Patents

Kobayakawa's latest patents include a "Processing solution preparation and supply method and apparatus." This invention features a dissolving preparation bath that supplies a material powder and ultrapure water. The apparatus is designed to connect to a substrate processing apparatus via a pipe, allowing for on-site preparation of processing solutions. This method helps to reduce microorganism concentration in ultrapure water by maintaining a constant circulation, thereby minimizing deterioration and concentration fluctuations in the processing solution.

Another significant patent is the "Developer waste liquid regenerating apparatus and method." This system includes a storage tank for TAAH (such as TMAH) and photoresist-containing developer waste liquid. It employs first and second separating means with NF membranes to effectively regenerate developer liquid. This innovative approach connects to a developing apparatus and a developer liquid control/supply apparatus, enhancing the overall efficiency of the developer liquid management process.

Career Highlights

Throughout his career, Yasuyuki Kobayakawa has worked with reputable companies such as Nagase & Company, Ltd. and Nagase Cms Technology Co., Ltd. His experience in these organizations has contributed to his expertise in semiconductor processing technologies.

Collaborations

Kobayakawa has collaborated with notable colleagues, including Shu Ogawa and Makoto Kikukawa. These partnerships have likely fostered a creative environment that has led to innovative solutions in their field.

Conclusion

Yasuyuki Kobayakawa's contributions to semiconductor processing through his patents demonstrate his commitment to innovation and efficiency. His work continues to impact the industry positively, showcasing the importance of advancements in technology.

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