The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2005
Filed:
Nov. 27, 2002
Shu Ogawa, Tokyo, JP;
Yasuyuki Kobayakawa, Tokyo, JP;
Yoshiya Kitagawa, Yokohama, JP;
Makoto Kikukawa, Yokohama, JP;
Shu Ogawa, Tokyo, JP;
Yasuyuki Kobayakawa, Tokyo, JP;
Yoshiya Kitagawa, Yokohama, JP;
Makoto Kikukawa, Yokohama, JP;
Nagase & Co., Ltd., , JP;
Abstract
A developer liquid regenerating system is provided with a storage tank storing a TAAH (such as TMAH)- and photoresist-containing developer waste liquid, first separating means with NF membrane, connected to the waste liquid storage tank through conduits, a storage tank connected to the first separating means through a conduit, and second separating means with NF membrane, connected to the storage tank through conduits. The developer liquid regenerating system is also connected to a developing apparatus through a conduit connected to the storage tank, and to a developer liquid control/supply apparatus through a conduit connected to the storage tank.