Makoto Kikukawa

Title: Innovations by Makoto Kikukawa: Pioneering Water-Based Solutions in Semiconductor Processing

Introduction

Makoto Kikukawa, an accomplished inventor based in Yokohama, Japan, has made significant contributions to the field of semiconductor processing. With a portfolio of seven patents, Kikukawa has focused on advancements that enhance the efficiency and effectiveness of water-based resist stripping liquids.

Latest Patents

Kikukawa's latest innovations include the development of a "Water-based resist stripping liquid management apparatus" and its corresponding method. This apparatus innovatively manages a water-based resist stripping liquid used in resist stripping equipment. It employs an absorptiometer for measuring water concentration and an electrical conductivity meter for assessing degraded component concentration in real-time. By integrating these measurements into the resist stripping treatment bath, the performance of the water-based resist stripping liquid is optimized, leading to reduced liquid usage and minimized downtime.

Additionally, his "Processing solution preparation and supply method and apparatus" features a dissolving preparation bath that combines material powder with ultrapure water. This system circulates ultrapure water continuously to manage microorganism levels and ensure stable processing solution quality for semiconductor substrates. These advancements not only improve the consistency of the processing solutions but also enhance economic efficiency by reducing particle formation.

Career Highlights

Kikukawa's innovative journey includes stints at renowned organizations such as Nagase & Company, Ltd. and Nagase Cms Technology Co., Ltd. His work in these companies laid the foundation for his inventive solutions that are critical in semiconductor manufacturing processes.

Collaborations

Throughout his career, Kikukawa has collaborated with notable individuals in the field, including Shu Ogawa and Toshimoto Nakagawa. These partnerships have fostered a rich environment for innovation, leading to the creation of solutions that address real-world challenges in semiconductor processing.

Conclusion

Makoto Kikukawa stands out as a significant figure in the innovation landscape, particularly with his water-based solutions that improve semiconductor processing. His dedication to advancing technology is reflected in his patents and contributions within the industry, reinforcing the critical role of inventors in shaping the future of semiconductor manufacturing.