The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2006
Filed:
Jun. 25, 2002
Toshimoto Nakagawa, Kawasaki, JP;
Yuko Katagiri, Kawasaki, JP;
Shu Ogawa, Tokyo, JP;
Satoru Morita, Tokyo, JP;
Makoto Kikukawa, Yokohama, JP;
Toshimoto Nakagawa, Kawasaki, JP;
Yuko Katagiri, Kawasaki, JP;
Shu Ogawa, Tokyo, JP;
Satoru Morita, Tokyo, JP;
Makoto Kikukawa, Yokohama, JP;
Nagase & Co., Ltd., Osaka, JP;
Hirama Laboratories Co., Ltd., Kanagawa, JP;
Nagase CMS Technology Co., Ltd., Tokyo, JP;
Abstract
The water-based resist stripping liquid management apparatus according to the present invention manages in an adjusting bath a water-based resist stripping liquid that is used in resist stripping equipment. In this apparatus, an absorptiometer that measures the water concentration in the water-based resist stripping liquid and an electrical conductivity meter that measures the degraded component concentration in the water-based resist stripping liquid are connected to a resist stripping treatment bath (adjusting bath) via pipelines, and at least one of a resist stripping stock liquid, a resist stripping reclaimed liquid, pure water, and a premixed resist stripping new liquid are fed into the resist stripping treatment bath in accordance with the measurement values obtained. As a result, the resist stripping performance of the water-based resist stripping liquid can be stably maintained, the amount of liquid used can be reduced, and the time for which operation is shut down can be reduced.