Tokyo, Japan

Yasutoshi Umehara

USPTO Granted Patents = 7 

Average Co-Inventor Count = 2.2

ph-index = 3

Forward Citations = 18(Granted Patents)


Location History:

  • Otaru, JP (1997 - 1999)
  • Sapporo, JP (2014)
  • Tokyo, JP (1996 - 2022)

Company Filing History:


Years Active: 1996-2022

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7 patents (USPTO):Explore Patents

Title: Innovator Yasutoshi Umehara: Advancements in Film Thickness Measurement

Introduction

Yasutoshi Umehara is a distinguished inventor based in Tokyo, Japan, known for his significant contributions to the field of measurement technologies. With a portfolio of seven patents, Umehara has been at the forefront of developing innovative systems and methods that enhance the precision and efficiency of film thickness measurement in various substrates.

Latest Patents

Umehara's latest patents include a novel film thickness measuring system and method. This system adeptly measures the thicknesses of first films on respective substrates using spectroscopy. It captures image data from the surfaces of second substrates, allowing for the acquisition of color information. By calculating the correlation between the thickness of a second film and the color information of the surface, Umehara's system can estimate the thickness of a third film on another substrate. Additionally, his film thickness measurement device includes a unique method to calculate relative reflectances across different locations, providing enhanced accuracy in thickness measurement across multiple wafers.

Career Highlights

Throughout his career, Yasutoshi Umehara has held pivotal roles in renowned organizations. Notably, he has worked with Tokyo Electron Limited and Fujitsu Corporation, where he applied his expertise to develop cutting-edge technologies in measuring systems. His work has played an important role in advancing technology within the semiconductor and materials industries.

Collaborations

Umehara has collaborated with esteemed colleagues, including Kazuyuki Ozaki and Yoshiro Goto. Their combined efforts have contributed to the successful development and refinement of the innovative measuring systems for which Umehara is recognized today.

Conclusion

Yasutoshi Umehara's impact on the field of film thickness measurement showcases the critical role inventors play in technological advancements. His patents not only enhance measurement precision but also set new standards in the industry. As Umehara continues to innovate, his work promises to influence the future of measurement technologies for years to come.

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