This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignees: Nuflare Technology, Inc., Nuflare Technology America, Inc.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
2 out of 749 
1 out of 20 Years Active: 2026
Title: Yasuo Sengoku and Charged Particle Beam Writing Technology.
Introduction
Yasuo Sengoku is an inventor associated with Yokohama, Japan. His patent work focuses on charged particle beam writing systems and methods for detecting electrical discharges that could affect pattern accuracy. The supplied information lists 2 patents and identifies his work with Nuflare Technology, Inc. and Nuflare Technology America, Inc.
Latest Patents
Sengoku’s listed patents address the control and reliability of charged particle beam writing equipment.
“Charged particle beam writing apparatus and charged particle beam writing method” describes an apparatus that uses an electrode to deflect a charged particle beam. Its components include an amplifier, a diagnostic circuit, and a switching circuit that can route the amplifier output between the electrode and the diagnostic circuit. Coaxial cables connect these components, while a resistance links the inner conductors of two cables in parallel with the switching circuit. The design supports amplifier diagnosis within the beam-writing system.
“Charged particle beam writing apparatus, discharge detection method, and discharge detection apparatus” concerns detecting discharges in a column or high-voltage power supply. A sensor outputs a value indicating a change associated with a discharge. The control unit converts that output into a value with a consistent sign, integrates it over a fixed period, and uses the result to determine whether a discharge likely to cause a pattern error has occurred.
Career Highlights
The listed company affiliations connect Sengoku’s work with Nuflare Technology, Inc. and Nuflare Technology America, Inc. His patents address practical challenges in charged particle beam writing, including amplifier diagnostics and the detection of discharges that may compromise pattern accuracy.
Collaborations
Toru Ariizumi and Ayako Tanaka are identified as Sengoku’s coworkers. The available information does not specify their roles in the listed patents.
Conclusion
Yasuo Sengoku’s listed inventions focus on improving the diagnosis and reliability of charged particle beam writing systems, with particular attention to equipment control and discharge-related pattern errors.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile