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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12770821 B1

PDFFull Text
Date of Patent:
Oct. 20, 2026

Filed:

Dec. 09, 2021

Charged particle beam writing apparatus and charged particle beam writing method

Applicants:

Nuflare Technology, Inc., Yokohama, JP;

Nuflare Technology America, Inc., Sunnyvale, CA (US);

Inventors:

Yasuo Sengoku, Yokohama, JP;

Yoshikuni Goshima, Yokohama, JP;

John William Kay, Lagrangeville, NY (US);

Chising Lai, Hopewell Junction, NY (US);

Assignees:

NuFlare Technology, Inc., Yokohama, JP;

NuFlare Technology America, Inc., Sunnyvale, CA (US);

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Michael J Logie

Int. Cl.
CPC ...
H01J 37/147 (2006.01); H01J 37/04 (2006.01); H01J 37/30 (2006.01); H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
H01J 37/147 (2013.01); H01J 37/045 (2013.01); H01J 37/3007 (2013.01); H01J 37/3174 (2013.01);
Abstract

A charged particle beam writing apparatus according to one aspect of the present invention includes an electrode configured to deflect a charged particle beam, an amplifier configured to apply a deflection potential to the electrode, a diagnostic circuit configured to diagnose the amplifier, a switching circuit arranged between an amplifier output and the electrode, and configured to switch the amplifier output between the electrode and the diagnostic circuit, an electron optical system, a column configured to include the electrode and the electron optical system, a first coaxial cable configured to connect an output side of the amplifier with the switching circuit, a second coaxial cable configured to connect the electrode with the switching circuit, a third coaxial cable configured to connect the amplifier output side with the diagnostic circuit, and a resistance configured to connect, parallelly to the switching circuit, inner conductors of the first and second coaxial cables.

Find Patent Forward Citations

Sengoku, Yasuo. (2026). Charged particle beam writing apparatus and charged particle beam writing method (U.S. Patent No. 12770821). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12770821

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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