Company Filing History:
Years Active: 2005-2008
Title: Yasuo Araki: Innovator in Exposure Technology
Introduction
Yasuo Araki is a prominent inventor based in Yokohama, Japan. He has made significant contributions to the field of exposure technology, particularly in the development of advanced apparatuses for device manufacturing. With a total of two patents to his name, Araki's work has had a notable impact on the industry.
Latest Patents
Araki's latest patents include an exposure apparatus and a device manufacturing method. The first patent describes an exposure system that features a projection optical system designed to irradiate exposure light from a mask onto a substrate. This system includes a first support member that holds the projection optical system and a support structure that supports the first support member at a higher position than where it supports the projection optical system. The second patent focuses on a mask-holding apparatus for a light exposure apparatus, which is essential for exposing a substrate with an image of a pattern formed on a mask. This apparatus includes an illumination system for irradiating the mask with exposure light and a projection optical system for projecting the illuminated pattern onto the substrate. A movable mask stage securely supports the mask, and a pressing member applies a prescribed force to the mask from above.
Career Highlights
Yasuo Araki has built a successful career at Nikon Corporation, a leading company in imaging and optical products. His innovative work in exposure technology has contributed to the advancement of manufacturing processes in various industries.
Collaborations
Araki has collaborated with notable coworkers, including Noriaki Tokuda and Masahiko Yasuda. Their combined expertise has further enhanced the development of cutting-edge technologies in the field.
Conclusion
Yasuo Araki's contributions to exposure technology through his patents and work at Nikon Corporation highlight his role as a key innovator in the industry. His advancements continue to influence the future of device manufacturing.
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