The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2008
Filed:
Nov. 23, 2005
Naohiko Iwata, Kumagaya, JP;
Hideaki Sakamoto, Kumagaya, JP;
Masaya Iwasaki, Ageo, JP;
Ken Hattori, Okegawa, JP;
Masato Takahashi, Namegawa-machi, JP;
Yutaka Endo, Kumagaya, JP;
Yasuo Araki, Yokohama, JP;
Naohiko Iwata, Kumagaya, JP;
Hideaki Sakamoto, Kumagaya, JP;
Masaya Iwasaki, Ageo, JP;
Ken Hattori, Okegawa, JP;
Masato Takahashi, Namegawa-machi, JP;
Yutaka Endo, Kumagaya, JP;
Yasuo Araki, Yokohama, JP;
Nikon Corporation, Tokyo, JP;
Abstract
The exposure system comprises a projection optical system that irradiates exposure light emitted from a mask onto a substrate, a first support member that supports the projection optical system, and a support structure that supports the first support member, wherein the support member supports the first support member at a position that is higher than the position at which the first support member supports the projection optical system.