Location History:
- Kanagawa, JP (2006 - 2010)
- Tokyo, JP (2004 - 2018)
Company Filing History:
Years Active: 2004-2018
Title: Inventor Yasunari Suto: Innovations in Substrate Polishing Technology
Introduction
Yasunari Suto is a distinguished inventor based in Tokyo, Japan, recognized for his contributions to the field of substrate polishing technology. With a total of nine patents to his name, Suto has developed innovative solutions that enhance the precision and efficiency of substrate processing, particularly in the semiconductor industry.
Latest Patents
Among Suto's latest patents are the "Substrate Peripheral Portion Measuring Device" and the "Substrate Peripheral Portion Polishing Apparatus." The substrate measuring device features a projecting/receiving unit that projects laser light to a substrate's peripheral portion and captures the reflected light while liquid is flowing. A signal processing controller analyzes the reflected light to determine the polishing state of the substrate's peripheral area. This innovation allows for accurate monitoring of the polishing process and detection of the polish endpoint, even with liquid present.
The substrate polishing apparatus, on the other hand, is designed to achieve a flat finish on semiconductor wafers. It includes a polishing table equipped with a polishing surface and a substrate holder that presses the substrate against this surface. Additionally, it features a film thickness measuring device that measures the film's thickness on the substrate. The substrate holder comprises multiple pressure-adjustable chambers, allowing for precise adjustments based on the measurements provided by the film thickness device.
Career Highlights
Suto's career is marked by his tenure at Ebara Corporation, where he has played a pivotal role in advancing substrate polishing mechanisms. His expertise and innovative approach have significantly contributed to the company’s reputation as a leader in semiconductor processing technology.
Collaborations
Throughout his career, Yasunari Suto has collaborated with notable coworkers, such as Mitsuo Tada and Hironobu Yamasaki. These collaborations have further fueled innovation within the field, combining their expertise to pioneer new technologies that optimize substrate processing.
Conclusion
Yasunari Suto stands out as a prominent inventor in the realm of substrate polishing technology. His groundbreaking patents and commitment to innovation continue to shape the semiconductor industry, ensuring that advancements in precision and efficiency are consistently achieved. With his ongoing contributions, Suto exemplifies the vital role of inventors in driving technological progress.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.