The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2018
Filed:
Dec. 22, 2014
Ebara Corporation, Tokyo, JP;
Mitsuo Tada, Tokyo, JP;
Yasunari Suto, Tokyo, JP;
Hirofumi Ichihara, Tokyo, JP;
Kenya Ito, Tokyo, JP;
Tamami Takahashi, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
A projecting/receiving unit () projects a laser light to a peripheral portion () and receives the reflected light while a liquid is being fed to a substrate () and is flowing on the peripheral portion (). A signal processing controller () processes the electric signal of the reflected light to decide the state of the peripheral portion (). The state of the peripheral portion being polished is monitored. Moreover, the polish end point is detected. A transmission wave other than the laser light may also be used. The peripheral portion () may also be enclosed by a passage forming member thereby to form a passage properly. The peripheral portion can be properly measured even in the situation where the liquid is flowing on the substrate peripheral portion.