Yasuhide Den

Title: Yasuhide Den: Innovator in Semiconductor Technology

Introduction

Yasuhide Den is a prominent inventor based in Kawasaki, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on enhancing the efficiency and reliability of semiconductor manufacturing processes.

Latest Patents

Den's latest patents include a plasma processing apparatus, a semiconductor manufacturing apparatus, and an electrostatic chucking unit used thereof. The plasma processing apparatus features a wiring member that becomes substantially symmetrical on the plane of an electrostatic chuck unit. This design connects to the tip end of an RF introduction rod, ensuring uniform generation of an electric field due to bias RF, which mitigates plasma damage. Additionally, he has developed a nonvolatile memory device that includes source and drain regions formed in a semiconductor substrate, along with an insulating film and a dielectric film to store electric charge. The compressive stress in the channel region of this device is equal to or less than 50 MPa.

Career Highlights

Throughout his career, Yasuhide Den has worked with notable companies such as NEC Corporation and NEC Electronics Corporation. His experience in these organizations has allowed him to refine his expertise in semiconductor technologies and contribute to various innovative projects.

Collaborations

Den has collaborated with several talented individuals in the field, including Kenji Okamura and Masanobu Zenke. These partnerships have fostered a creative environment that has led to advancements in semiconductor technology.

Conclusion

Yasuhide Den's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the industry. His innovative approaches continue to shape the future of semiconductor manufacturing.