Location History:
- Hsinchu, TW (2004)
- Sanchung, TW (2005)
Company Filing History:
Years Active: 2004-2005
Title: Yao-Ting Shao: Innovator in Semiconductor Technology
Introduction
Yao-Ting Shao is a prominent inventor based in Sanchung, Taiwan. He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approach to improving manufacturing processes.
Latest Patents
One of his latest patents is titled "Process for improving critical dimension uniformity." This invention utilizes a double exposure and double etching method to enhance critical dimension uniformity. A coating layer is formed on a wafer that includes a first area and a second area. The first area and the second area are separately patterned with different processing conditions. Through this two-stage patterning, the CD uniformity between the wafer center and wafer edge is successfully improved compared to the conventional single-stage patterning process. As a result, the fabrication yield is enhanced.
Another notable patent is the "Method of forming contact." This patent discloses a method for manufacturing a contact. A substrate is provided, and a first dielectric layer and a metal layer are formed sequentially. A second dielectric layer is then formed on both the metal layer and the first dielectric layer. A bottom contact is created in the second dielectric layer to electrically connect to the metal layer. Additionally, a node contact is formed in both the first and second dielectric layers. A capacitor is established on the dielectric layer to connect electrically to the node contact, and a middle contact is formed on the second dielectric layer to connect to the bottom contact. Finally, a third dielectric layer is formed on the capacitor, the middle contact, and the second dielectric layer, with a top contact created in the third dielectric layer to connect to the middle contact.
Career Highlights
Yao-Ting Shao is currently employed at Winbond Electronics Corporation, where he continues to push the boundaries of semiconductor innovation. His work has been instrumental in enhancing the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Throughout his career, Yao-Ting has collaborated with notable colleagues, including Yi-Yu Hsu and Kuo-Chen Wang. These collaborations have contributed to the advancement of technology in their field.
Conclusion
Yao-Ting Shao is a distinguished inventor whose work in semiconductor technology has led to significant advancements in manufacturing processes. His innovative patents reflect his commitment to improving critical dimension uniformity and contact formation in