Phoenix, AZ, United States of America

Yakov Epshteyn

This inventor holds 5 USPTO granted patents. Top assignees: Speedfam-Ipec Corporation, Novellus Systems Incorporated. Active years: 2002-2005.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Yakov Epshteyn. Retrieved from https://idiyas.com/inventor/yakov-epshteyn-szi43te8

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile


% Patents Active = 60.0

Average Co-Inventor Count = 2.3

ph-index = 2

Forward Citations = 18(Granted Patents)


Company Filing History:


Years Active: 2002-2005

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5 patents (USPTO):Explore Patents

Title: The Innovations of Yakov Epshteyn

Introduction

Yakov Epshteyn is a notable inventor based in Phoenix, AZ (US). He has made significant contributions to the field of semiconductor manufacturing through his innovative methods and systems. With a total of 5 patents to his name, Epshteyn has developed technologies that enhance the efficiency and effectiveness of workpiece cleaning and polishing processes.

Latest Patents

Epshteyn's latest patents include a "Method for chemical mechanical planarization (CMP) and chemical mechanical cleaning (CMC) of a work piece." This method provides a way to planarize and polish the surface of a workpiece, such as a semiconductor wafer, while ensuring that the surface remains hydrophobic after the CMP process. Following this, a CMC process is employed to make the surface hydrophilic, enhancing the overall cleaning process.

Another significant patent is the "System and method for cleaning workpieces." This invention focuses on improving the cleaning of workpieces and cleaning tools by manipulating the surface charge of sponges used in the cleaning process. By exposing sponges to various cleaning fluids, the surface charge can be altered, which enhances the cleaning efficiency by attracting or repelling charged particles.

Career Highlights

Throughout his career, Epshteyn has worked with prominent companies in the semiconductor industry, including Speedfam-IPEC Corporation and Novellus Systems Incorporated. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in semiconductor technology.

Collaborations

Epshteyn has collaborated with notable professionals in his field, including Frank Krupa and Ellis G. Harvey. These collaborations have further enriched his work and led to innovative solutions in the industry.

Conclusion

Yakov Epshteyn's contributions to the field of semiconductor manufacturing through his patents and career achievements highlight his role as a significant inventor. His innovative methods for workpiece cleaning and polishing continue to influence the industry positively.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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