The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2002
Filed:
May. 09, 2001
Applicant:
Inventors:
Assignee:
SpeedFam-IPEC Corporation, Chandler, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 1/00 ; B08B 1/02 ; B08B 3/00 ; B08B 3/02 ; B08B 3/04 ;
U.S. Cl.
CPC ...
B08B 1/00 ; B08B 1/02 ; B08B 3/00 ; B08B 3/02 ; B08B 3/04 ;
Abstract
The cleaning pads ( ) that are used to clean work pieces ( ), such as semiconductor wafers, are cyclically compressed against one another and rinsed with a rinsing fluid. By cyclically compressing the cleaning pads ( ) together and rinsing them, the debris that the cleaning pads remove from the work pieces ( ) and that becomes embedded in, and adhered to, the cleaning pads ( ) is subsequently removed therefrom.